Ion Implantation Services

Technical Support Excellence

As a world-class leader in ion technology, Ion Beam Services (IBS) provides a comprehensive suite of solutions designed to meet the rigorous demands of the semiconductor, medical, and industrial sectors.
Our “Total Solution” approach ensures that your processes are optimized for peak performance and reliability.

our core solutions

Ion Implantation Services

Precision Ion Implantation Foundry

Our state-of-the-art foundry services provide high-precision ion implantation for research, development, and high-volume production. We specialize in modifying the electrical, optical, and physical properties of materials at the atomic level.

High-Performance Ion Implantation for R&D and Production

IBS operates one of the most versatile ion implantation foundries in Europe. We support a wide range of applications, from standard CMOS doping to specialized treatments for wide-bandgap semiconductors like Silicon Carbide (SiC) and Gallium Nitride (GaN).

Comprehensive Substrate & Ion Species Capabilities

Comprehensive Substrate & Ion Species Capabilities We offer unparalleled flexibility in terms of substrate handling and chemical variety, ensuring that even the most complex material requirements are met with precision.

Wafer Sizes and Material Compatibility

· Substrate Range: Full capability for wafers from 2-inch (50mm) to 12-inch (300mm).
· Material Types: Silicon, Glass, Polymers, Ceramics, and Compound Semiconductors (III-V, II-VI).
· Non-Standard Substrates: Expertise in handling fragile, thin, or oddly shaped substrates.

Extensive Ion Species Library

With a library of over 65 different ion species, we can perform:
· Standard dopants: Boron (B), Phosphorus (P), Arsenic (As).
· Specialty ions: Hydrogen (H), Helium (He), Oxygen (O), Noble Gases.
· Metallic ions: Transition metals and rare earth elements for advanced material research.

Advanced Metrology and Process Control

To guarantee the highest quality, our foundry services are backed by rigorous metrology and characterization tools:
· SIMS (Secondary Ion Mass Spectrometry) for depth profiling.
· SRP (Spreading Resistance Profiling) for electrical activity mapping.
· Sheet Resistance Mapping to ensure across-wafer uniformity.

our core solutions

Customer Support

Global Engineering Excellence

At IBS, we understand that uptime is critical. Our global support network is dedicated to providing rapid, expert assistance to maintain the performance of your ion beam equipment.

Worldwide Field Service Engineering (FSE)

Our team of highly skilled Field Service Engineers is available for international deployment. We provide on-site installation, commissioning, and emergency troubleshooting for all major brands of ion implanters.

Customized Maintenance Contracts

We offer tiered maintenance solutions tailored to your operational needs:
· Preventive Maintenance (PM): Regularly scheduled audits and service to prevent unexpected downtime.
· Curative Maintenance: Rapid response for critical system failures.
· Full Service Contracts: Comprehensive coverage including labor, travel, and parts.

Technical Training and Knowledge Transfer

Empower your team with our specialized training modules. We provide:
· Operator Training: Safe and efficient system operation.
· Maintenance Training: In-depth technical courses for on-site engineers to handle first-level repairs and routine maintenance.

our core solutions

Ion Implanters Upgrade

Modernization & Retrofitting

Maximize your Return on Investment by extending the lifecycle of your existing equipment through our advanced upgrade and retrofit packages.

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Extending Equipment Lifecycle with Performance Retrofits

Instead of replacing legacy systems, IBS provides solutions to bring older implanters up to modern standards. Our retrofits improve reliability, throughput, and process repeatability.

Software and Control System Upgrades

With a library of over 65 different ion species, we can perform:
We replace obsolete control hardware and software with modern, user-friendly interfaces.
· Enhanced Connectivity: Integration with modern FAB automation and SECS/GEM protocols.
· Improved Process Monitoring: Advanced data logging and real-time fault detection.

Specialized Retrofits for Emerging Technologies

We offer specific hardware upgrades to optimize legacy tools for modern materials:
· High-Temperature Implantation: Retrofits for SiC processing.
· Enhanced Cooling Systems: For high-dose, low-temperature applications.
· Robotic Handling Upgrades: To reduce contamination and improve wafer safety.

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Replacement Parts

Reliable Spares and Component Repair

IBS is your global partner for high-quality consumables and expert repair services for all ion implantation sub-systems.

Discover our replacement parts shop : Access your customer area now

Your tailored customer area gives you access to our wide parts catalog and order history.

Ion Implantation Services

Technical Support Excellence

our core solutions