The 3rd and 4th FLEXion series ion implanters have been delivered to a major semiconductor manufacturer in Germany and to the Semi-Conductor Laboratory in India.
These production tools are fitted with the latest hardware and software enhancements to optimize ion implantation of III-V substrates. The III-V configuration is the second type of FLEXion series production ion implanters available in addition to the SiC high temperature/high energy configuration.
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