The first FLEXion-400 ion implanter, latest evolution of the new IBS FLEXion line of products, has been delivered to a major research institute in China and is fully operational since May 2018.
The FLEXion line is the brand new generation of medium current ion implanters developed by IBS, and represents a leap forward in terms of productivity and performances compared to the IMC implanters.
The FLEXion implanters are available in both 200 kV and 400 kV acceleration voltage and are fitted with a high selectivity analyzer magnet and IHC ion source.
They are optimized to address volume production for SiC and III-V substrates markets.