6” SiC high temperature implantation service is now available upon request.
With this latest upgrade, IBS is now able to perform implants up to 600°C for both 4” and 6” substrates, with annealing up to 1 800°C.
Automatic chained implants are also possible thanks to the dedicated high temperature handling station fitted on our equipment.
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ZI de Peynier-Rousset
Rue Gaston Imbert
13790 Peynier, FRANCE
+33 (0)4 42 53 89 53
information@ion-beam-services.fr
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